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Start Over Area of Honors Engineering Science Keyword biased target ion beam deposition Keyword thin film Keyword thin film Access Level open_access

1. SHAPE MEMORY EFFECT IN ULTRA-THIN NICKEL TITANIUM ALLOY FILMS DEPOSITED BY BIASED TARGET ION BEAM DEPOSITION

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Open Access

Author:: Tang, Yuan
Title:: SHAPE MEMORY EFFECT IN ULTRA-THIN NICKEL TITANIUM ALLOY FILMS DEPOSITED BY BIASED TARGET ION BEAM DEPOSITION
Area of Honors:: Engineering Science
Keywords:: niti
nickeltitanium
btibd
biased target ion beam deposition
thin film
fast actuation
mems
shape memory alloys
File:: Download thesis_yuan.pdf
Thesis Supervisors:: Mark William Horn, Thesis Supervisor
Dr. Sean N Brennan, Thesis Honors Advisor