1. A Study Of Biased Target Ion Beam Deposited Dielectric Oxides Open Access Author: Aronovich, Felix Title: A Study Of Biased Target Ion Beam Deposited Dielectric Oxides Area of Honors: Engineering Science Keywords: Biased Target Ion Beam DepositionDielectric oxidesI-VTFT File: Download FINAL_THESIS__11_19_13_.pdf Thesis Supervisors: Mark William Horn, Thesis SupervisorBernhard R Tittmann, Thesis Honors AdvisorJudith A Todd Copley, Faculty Reader
