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1. A Study Of Biased Target Ion Beam Deposited Dielectric Oxides

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Author:: Aronovich, Felix
Title:: A Study Of Biased Target Ion Beam Deposited Dielectric Oxides
Area of Honors:: Engineering Science
Keywords:: Biased Target Ion Beam Deposition
Dielectric oxides
I-V
TFT
File:: Download FINAL_THESIS__11_19_13_.pdf
Thesis Supervisors:: Mark William Horn, Thesis Supervisor
Bernhard R Tittmann, Thesis Honors Advisor
Judith A Todd Copley, Faculty Reader