1. SHAPE MEMORY EFFECT IN ULTRA-THIN NICKEL TITANIUM ALLOY FILMS DEPOSITED BY BIASED TARGET ION BEAM DEPOSITION Open Access Author: Tang, Yuan Title: SHAPE MEMORY EFFECT IN ULTRA-THIN NICKEL TITANIUM ALLOY FILMS DEPOSITED BY BIASED TARGET ION BEAM DEPOSITION Area of Honors: Engineering Science Keywords: nitinickeltitaniumbtibdbiased target ion beam depositionthin filmfast actuationmemsshape memory alloys File: Download thesis_yuan.pdf Thesis Supervisors: Mark William Horn, Thesis SupervisorDr. Sean N Brennan, Thesis Honors Advisor