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1. A Study Of Biased Target Ion Beam Deposited Dielectric Oxides

Open Access
Author:
Aronovich, Felix
Title:
A Study Of Biased Target Ion Beam Deposited Dielectric Oxides
Area of Honors:
Engineering Science
Keywords:
File:
Thesis Supervisors:
  • Mark William Horn, Thesis Supervisor
  • Bernhard R Tittmann, Honors Advisor
  • Judith A Todd, Faculty Reader