1. An Investigation of the Electron Transport Mechanisms in Silicon Carbide for use as a Low-k Dielectric Open Access Author: Ebersole, Chad Martin Title: An Investigation of the Electron Transport Mechanisms in Silicon Carbide for use as a Low-k Dielectric Area of Honors: Engineering Science Keywords: low-kdielectricsemiconductorelectron transportSiCsilicon carbide File: Download Chad_Ebersole_-_Thesis.pdf Thesis Supervisors: Dr. Patrick M Lenahan, Thesis SupervisorDr. Patrick M Lenahan, Thesis Honors AdvisorChristine Masters, Faculty Reader
